NEWPORT, Wales, June 15 /PRNewswire-FirstCall/ -- Trikon Technologies,
Inc. (Nasdaq: TRKN), a leading provider of wafer fabrication equipment and
services to the global semiconductor industry, announced today that its Omega
fxP for silicon trench etching has been short listed for best tool in the
Eurosemi IC Industry Wafer Processing category. Trikon's Omega fxP is
equipped with in-situ interferometric end-point detection (IEPD) allowing
semiconductor producers to achieve better yields at lower costs.
"Leading power device makers that have recently switched to using Omega
ICP etchers in production are benefiting from our industry-leading depth
control," commented president and CEO of Trikon Technologies, Dr. John
Macneil. "In turn, this leads to higher device yields and lower overall costs
through reduced scrap. A major reason for these improvements is the use of
IEPD."
Dr. Macneil explained, "In a power MOSFET device the depth control of the
front-end silicon trench is critical to the performance of the final device.
IEPD continuously records the progress of the etch front and automatically
terminates the process at a pre-programmed depth."
The Eurosemi IC Industry Awards will be announced during SEMICON West, a
major industry trade show to be held July 12-14 of this year. The voting
period is still open, and individuals may submit their votes at
http://www.eurosemi.eu.com. The awards are given to highlight innovation and best
practice in the IC industry where technical achievement is expected and every
decision and idea is a potential breakthrough. The awards focus on the people,
processes and products that drive the industry forward. They are aimed to
recognize the vital individuals and companies that enable a company to achieve
success in a competitive global market.
About Trikon Technologies
Trikon Technologies is a leading provider of wafer fabrication equipment
and services to the global semiconductor industry. Trikon develops and
manufactures advanced capital equipment for plasma etching and chemical and
physical vapor deposition (CVD and PVD) of thin films for use in the
production of semiconductor, MEMS and similar devices. These are key
components in most advanced electronic products, such as telecommunication
devices, consumer and industrial electronics and computers. More information
is available at: http://www.trikon.com.
SOURCE Trikon Technologies, Inc.
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Related links:
http://www.trikon.com
CONTACT:
Katrina Bomont, Marketing Publicity Manager
of Trikon Technologies, Inc., +44 (0) 1633 414030, or
katrina.bomont@trikon.com; or Stew Chalmers of Positio,
+1-818-980-3762, or stew@positio.com, or investors, Kevin Kirkeby
of The Global Consulting Group, +1-646-284-9416, or
kkirkeby@hfgcg.com, both for Trikon Technologies, Inc.
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