New Product Family Offers Shorter Processing Times and Increased
Productivity for Multiple Semiconductor Processes
FORT COLLINS, Colo., June 27 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (Nasdaq: AEIS) today announced its new line of Sekidenko
optical fiber thermometers (OFTs) and emissometers comprised of the
OR4000T, OR4000E and OR400T family of products. AE(R)'s OFTs are ideally
suited for tightly controlled, temperature- and emissivity-dependent
applications such as laser annealing, RTP, MO-CVD, PE-CVD, PVD, metal etch
and other applications. The new Sekidenko product family offers original
equipment manufacturers (OEMs) the exceptional stability and product
flexibility needed to meet the increasingly stringent demands of today's
leading semiconductor applications. AE will introduce the new OR4000
product family during SEMICON(R) West 2006, to be held July 11-13 at San
Francisco's Moscone Convention Center.
(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO )
AE's advanced Sekidenko thermal instrumentation products provide OEMs
with superior, non-contact temperature and emissivity capabilities for
semiconductor processes where uniform substrate temperatures enable
critical process results and enhanced throughput and yield. Modular in
design, AE's OR4000T and OR4000E can be rapidly tailored to meet the unique
requirements of each process application.
Chuck Gooding, vice president of the Sekidenko product line, noted,
"AE's Sekidenko instrumentation delivers the high stability, exceptional
repeatability and precision required for advanced, volume-production
environments. Based on the successful OR2000 family, this new line of OFTs
continues AE's best-of-breed tradition. Our dedication to technology
innovation exemplifies our commitment to increasing our customers'
competitive advantage."
OR4000T Multi-Channel OFT
The OR4000T provides multi-channel temperature measurement and enables
uniform, integrated measurements within multiple chambers. Designed for
RTP, HDP-CVD, epi, ALD and HDD applications, the OR4000T supports read
rates up to 2 KHz for the most demanding semiconductor applications.
OR4000E Real-Time Emissivity Compensated OFT
The OR4000E delivers the same high speed performance as the OR4000T
with the added benefit of real-time emissivity compensated temperature
measurement and the capability to support growth rate monitoring typically
required for MO-CVD applications. Designed for RTP, HDP-CVD, MO-CVD and UV
cure, the OR4000E provides accurate temperature and emissivity measurements
across a wide variety of processes.
OR400T Precision, Single-Channel OFT
The OR400T is a precision instrument that enables cost-effective
temperature measurement in a compact form factor. The single-channel
product provides a cost competitive alternative to thermocouples with the
added benefit of non-contact, in-situ temperature measurement and immunity
from RF noise. The OR400T is ideally suited for several high-volume
semiconductor applications including PE-CVD, LP-CVD, PVD and metal etch.
To learn more about AE's new line of OFTs and emissometers during
SEMICON West, visit the company in Booth #2202 in the South Hall at Moscone
Convention Center in San Francisco. Editors interested in meeting with AE
during the show may contact Angie Kellen by phone: 650.968.8900 x120, or
email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy(R) develops innovative power and control technologies
that drive high-growth, plasma thin-film manufacturing processes worldwide,
including semiconductors, flat panel displays, data storage products, solar
cells, architectural glass and other advanced product applications.
AE(R)'s product portfolio includes precise, flexible power systems;
reliable gas and liquid flow-management systems; accurate thermal
instruments; and global support services. Leveraging this focused product
portfolio and technology leadership, AE creates solutions aimed at
maximizing process impact, improving productivity and lowering cost of
ownership for its customers, including original equipment manufacturers
(OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and
offers global sales and support through direct offices, representatives and
distributors. Founded in 1981, AE is a publicly held company traded on
Nasdaq National Market under the symbol AEIS. For more information, go to
http://www.advanced-energy.com
Advanced Energy(R) and AE(R) are trademarks of Advanced Energy
Industries, Inc.
SEMICON(R) is a trademark of Semiconductor Equipment and Materials
International (SEMI).
SOURCE Advanced Energy Industries, Inc.
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Related links:
http://www.advanced-energy.com
Photo Notes:
NewsCom: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
AP Archive: http://photoarchive.ap.org
PRN Photo Desk, photodesk@prnewswire.com
CONTACT:
Marna Shillman, Corporate Communication
Manager of Advanced Energy Industries, Inc., +1-970-407-6280,
marna.shillman@aei.com; or Angie Kellen, Account Director of MCA,
+1-650-968-8900, akellen@mcapr.com, for Advanced Energy
Industries, Inc.
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