FORT COLLINS, Colo., July 3 /PRNewswire-FirstCall/ -- Advanced
Energy(R) Industries, Inc. (Nasdaq: AEIS) today announced its newest power
platform: the Paramount(TM) RF-power delivery system. Featuring
unprecedented power- delivery accuracy and control for increasingly complex
film stacks and fine feature sizes, the 3 kW Paramount system is well
suited for both etch and deposition processes in semiconductor, FPD, MEMS
and solar photovoltaic manufacturing. AE(R) will highlight the new
Paramount platform during SEMICON(R) West 2007, to be held July 17-19 at
San Francisco's Moscone Convention Center.
(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO )
Next-generation device fabrication processes feature anti-reflective
coatings, hard masks, cap layers and stop layers in their recipes. Process
designers must account for these layers while at the same time accurately
etch or deposit the primary layer that may comprise multiple compositions
and doping profiles. The Paramount platform easily accommodates these
complexities with ultra-accurate power control and delivery across the full
output range-both on and off 50 ohm-for seamless process transitions in
etch, strip, PECVD, HDP-CVD, PVD and PEALD. Where pulsing is required to
enable next-generation process steps, the Paramount system's optional pulse
and pulse synchronization features offer the widest pulse-frequency range
available.
Hans Betz, president and CEO of AE noted, "The Paramount system
continues AE's tradition of enabling process-power innovation. This new
platform has also facilitated AE's continued, technical collaboration with
our valued OEM customers. Paramount systems are already installed on
next-generation etch platforms at major OEMs worldwide."
The Paramount RF power-delivery system raises the bar for RF power
products -- offering the finest control in the industry, with breakthrough
performance and technology. This half-rack, 3 kW RF power supply's
impedance measurement rivals the accuracy of a network analyzer, enabling
unprecedented power delivery accuracy and control at 13.56 MHz fixed or
variable frequencies. Able to keep pace -- in real time -- with the most
abrupt plasma-impedance changes, the Paramount system enables faster
transitions, shorter process steps and reduced process times, while
optional frequency tuning performs virtually instantaneously (within msec)
-- faster than any other product on the market. The result is truly
unprecedented accuracy, repeatability and process control -- for 50 ohm and
non-50 ohm loads.
To learn more about AE's new line of Paramount RF power systems during
SEMICON West, visit the company in booth #2202 in the South Hall at Moscone
Convention Center in San Francisco and visit
http://www.advanced-energy.com/en/Paramount.html. Editors interested in
meeting with AE during the show may contact Angie Kellen by phone:
650.968.8900 x120, or email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy develops innovative power and control technologies that
drive high-growth, plasma thin-film manufacturing processes worldwide,
including semiconductors, flat panel displays, data storage products, solar
cells, architectural glass and other advanced product applications.
AE's product portfolio includes precise, flexible power systems;
reliable gas and liquid flow-management systems; accurate thermal
instruments; and global support services. Leveraging this focused product
portfolio and technology leadership, AE creates solutions aimed at
maximizing process impact, improving productivity and lowering cost of
ownership for its customers, including original equipment manufacturers
(OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and
offers global sales and support through direct offices, representatives and
distributors. Founded in 1981, AE is a publicly held company traded on
Nasdaq Global Market under the symbol AEIS. For more information, go to
http://www.advanced-energy.com.
Advanced Energy(R), AE(R) and Paramount(TM) are trademarks of Advanced
Energy Industries, Inc.
SEMICON(R) is a trademark of Semiconductor Equipment and Materials
International (SEMI).
SOURCE Advanced Energy Industries, Inc.
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Related links:
http://www.advanced-energy.com
http://www.advanced-energy.com/en/Paramount.html
Photo Notes:
NewsCom: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
AP Archive: http://photoarchive.ap.org
PRN Photo Desk, photodesk@prnewswire.com
CONTACT:
Marna Shillman, Director, Global Marketing
Communications of Advanced Energy Industries, Inc.,
+1-970-407-6280, marna.shillman@aei.com; Angie Kellen, Account
Director of MCA, +1-650-968-8900, akellen@mcapr.com
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