Non-Destructive Measurement Technology Speeds Introduction of Next Generation
Transistors
SUNNYVALE, Calif., July 6 /PRNewswire/ -- ReVera Incorporated, the leading
provider of compositional metrology solutions for semiconductor manufacturing,
announces the availability of its new zMAX(TM) elemental depth distribution
technology for the RVX(TM) 1000 compositional metrology system.
By extending the capabilities of ReVera's highly successful RVX 1000
metrology product customers are able to control the variations that occur
inside a film, as well as the variations across a film. With this extra
dimension of metrology, the RVX 1000 now enables complete composition control
of critical films in 65nm and 45nm process development and manufacturing.
David Ring, President and CEO of ReVera, stated: "The performance and
yield of today's transistors depends critically on controlling the composition
variation inherent to the new processes and materials used in manufacturing.
ReVera's RVX 1000 metrology system has been widely adopted by many leading
edge semiconductor customers because it solves this critical need."
Continuing, Ring commented: "To enable the next generation of device
performance, our customers are now enhancing these transistor film structures
by engineering the composition through the depth of the films. For development
and manufacturing, they have a significant challenge verifying and controlling
variations in film composition from the top of the film to the bottom. zMAX
technology for the RVX 1000 solves this critical need."
Designed for use in a production environment, ReVera's proprietary zMAX
technology integrates seamlessly into the flexible, recipe configurable RVX
1000 metrology system.
ReVera will highlight its zMAX depth distribution technology at the
upcoming SEMICON West show in San Francisco, July 12-14, 2005. Visit ReVera at
Booth # 4218 and "Ask Us About zMAX!"
About ReVera
ReVera, Inc is the leading provider of high precision compositional
metrology solutions for ultra-thin films used in advanced semiconductor
devices. Established in 2004 with a management spin-out from High Voltage
Engineering and Physical Electronics, ReVera is the first company to
successfully commercialize traditional laboratory-based surface analytical
techniques for production metrology of compositionally critical films in the
semiconductor industry. To learn more about ReVera, visit http://www.revera.com.
For more information, please contact:
Tom Larson
ReVera Incorporated
408-530-3600
SOURCE ReVera Incorporated
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Related links:
http://www.revera.com
CONTACT:
Tom Larson of ReVera Incorporated,
+1-408-530-3600
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