AE Also Showcasing Litmas(TM) RPS 1501 and 3001 Remote Plasma Source Platform,
Summit(TM) Specialized DC Power System and Navigator(TM) Digital Matching
Network
FORT COLLINS, Colo., July 7 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (Nasdaq: AEISE) today announced that it will debut its
Aera(R) PI-980(TM) series pressure-insensitive mass flow controller (MFC)
during SEMICON West 2005. The company also will feature its Litmas(TM) RPS
1501 and 3001 remote plasma source platform, the Summit(TM) specialized DC
power system and Navigator(TM) digital matching network at the exposition,
held July 12-14 at San Francisco's Moscone Center.
(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO )
The new Aera PI-980 series pressure-insensitive MFC delivers greater flow
stability, faster response, higher accuracy and superior real-time process
control than previous technologies or competitive products. The PI-980 series
is especially well-suited for etch, CVD, PVD and diffusion applications.
Its superior gas-flow stability delivers greater chamber-to-chamber process
repeatability for improved production yields. The advanced design integrates
traditional thermal flow architecture with a pressure sensor, pressure
display, temperature sensor, and NeuralStep(TM) control technology, creating a
single delivery package and eliminating the need for the costly gas-panel
components traditionally used to perform the same function.
Also showcased this year in AE's booth #2202 will be the Litmas RPS
integrated plasma source and power-delivery system. The Litmas RPS is well-
suited to deliver reactive gas specie fluxes for process applications such as
wafer pre-clean, photoresist strip and thin-film deposition. Its small
footprint, high performance, ease of use and low cost of ownership allow
process engineers to focus on developing critical plasma-based processes with
lower device damage, higher throughput and higher yields.
In addition, AE will feature the newly-introduced Summit DC power supply
that enables higher yields, increased throughput and a new level of process
flexibility for sub-65 nm semiconductor, including the most demanding
Generation 7 and 8 flat panel display (FPD) applications. The Summit power
system delivers state-of-the-science arc management as well as exceptional
power repeatability and precision to achieve the tight plasma process control
for consistently high yields.
Also exhibited at the show will be the Navigator digital matching network,
which provides advanced match technology for rapid, accurate and reliable
matching across a wide range of load impedances. Equipped with
microprocessor-controlled stepper motor circuitry and digital, user-selectable
tuning algorithms, the Navigator matching network minimizes reflected power by
automatically tuning the complex impedance of a coupled plasma. An optional,
internal Z'Scan(R) RF sensor allows real-time measurement and analysis of
process power and impendence, providing the ability to identify and
significantly reduce process variability.
To learn more about AE's products during SEMICON West, July 12-14, visit
their booth #2202 in the south hall at the Moscone Convention Center in San
Francisco. Editors interested in meeting with AE during the show may contact
Angie Kellen by phone at: (650) 968-8900 x120, or email: akellen@mcapr.com.
About Advanced Energy
Advanced Energy is a global leader in the development and support of
technologies critical to high-technology manufacturing processes used in the
production of semiconductors, flat panel displays, data storage products,
compact discs, digital video discs, architectural glass and other advanced
product applications.
Leveraging a diverse product portfolio and technology leadership, AE
creates solutions that maximize process impact, improve productivity and lower
cost of ownership for its customers. This portfolio includes a comprehensive
line of technology solutions in power, flow management, thermal
instrumentation and plasma and ion beam sources for original equipment
manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and
offers global sales and support through direct offices, representatives and
distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq
National Market under the symbol AEISE. More information can be found at
http://www.advanced-energy.com
Advanced Energy, AE, Aera, PI-980, NeuralStep, Litmas and Navigator are
trademarks of Advanced Energy Industries, Inc.
Visit AE at SEMICON West South Hall Booth #2202
CONTACTS:
Marna Shillman Angie Kellen
Corporate Communication Manager Sr. Account Manager
Advanced Energy Industries, Inc. MCA
970.407.6280 650.968.8900
marna.shillman@aei.com akellen@mcapr.com
SOURCE Advanced Energy Industries, Inc.
 back to top
Related links:
http://www.advanced-energy.com
Photo Notes:
NewsCom:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
AP Archive: http://photoarchive.ap.org
PRN Photo Desk, photodesk@prnewswire.com
CONTACT:
Marna Shillman, Corporate Communication
Manager, of Advanced Energy Industries, Inc., +1-970-407-6280,
marna.shillman@aei.com; or Angie Kellen of MCA, +1-650-968-8900,
akellen@mcapr.com, for Advanced Energy Industries, Inc.
|
