Company Will Feature Satin(TM) Silicon Nitride LPCVD Process
SCOTTS VALLEY, Calif., July 7 /PRNewswire/ -- Aviza Technology, Inc., a
global supplier of production-proven thermal process and atomic layer
deposition (ALD) systems, today announced that it has been selected among a
group of 23 companies to participate at SEMI's Technology Innovation Showcase
(TIS), to be held in conjunction with SEMICON West 2005. The three-day
special session will take place Tuesday, July 12 through Thursday, July 14 at
the Emerging Technologies (Esplanade) Hall of San Francisco's Moscone
Convention Center. Through exhibits and presentations, participating
companies will highlight how their innovative technologies and product
solutions impact the semiconductor and related industries.
On Tuesday, July 12 from 4:20 - 4:40 p.m. at the Esplanade Hall, Aviza
will be delivering a presentation on Satin -- its low pressure chemical vapor
deposition (LPCVD) process for depositing silicon nitride (SiN) at
approximately 500 degrees C. Satin is an adaptable precursor material used to
deposit silicon nitride at a wide range of deposition temperatures, which is
extendible across a broad range of processes and into back-end-of-line (BEOL)
applications. Used in conjunction with Aviza's patented Cross-Flow(TM)
technology, Satin is designed to lower chemical consumption rates, reduce
process costs and provide flexibility to run variable load sizes. Aviza's
proprietary Cross-Flow technology is designed to enable chipmakers to achieve
single-wafer performance in a batch tool resulting in increased throughput and
productivity that reduces cost of ownership.
In today's manufacturing environment, meeting the proper thermal budget
requirements for each sub-90-nm process step is critical in order to keep pace
with the scaling of device geometries and manufacturing trends moving to lower
and lower temperatures. Thick SiN deposition requires temperatures less than
650 degrees C for pad nitride applications and low temperature SiN deposition
for spacer applications requires near 500 degrees C temperatures. By-products
like ammonium chloride generated during this process can adversely impact the
integrity of the device. Chlorine can cause pitting or roughening of the
underlying or adjacent silicon, while carbon can impact wet etch
characteristics, diffuse into the gate electrode and cause an increase in
conductivity. The Satin process produces no ammonium chloride. Another
concern for device makers is damage caused by plasma process-induced charging.
Because Satin is a purely thermally activated process, it eliminates the
concern of plasma damage.
"Satin is a result of a strategic collaboration with Air Liquide, where
Air Liquide supplied the chemicals and performed the related analyses and both
companies collaborated to jointly develop the low temperature SiN process,"
said Helmuth Treichel, Director of Process Technology at Aviza Technology,
Inc. "We believe that this versatile precursor molecule will provide
chipmakers with a viable solution that will enable them to meet the thermal
budget, contamination and plasma damage requirements for manufacturing devices
at the 90-nm node and below processes."
For more information about Aviza and its products, please visit the
company during SEMICON West 2005 at booth #1616 in the South Hall or #T5 in
the Esplanade Hall of the Moscone Convention Center.
About Aviza Technology, Inc.
Aviza Technology is a supplier of thermal processing, low-pressure
chemical vapor deposition and atomic layer deposition solutions to the global
semiconductor industry. The company maintains a worldwide installed base of
more than 2,500 tools. Aviza's headquarters, manufacturing and R&D facilities
are located in Scotts Valley, Calif. Additional sales and customer support
facilities are located in Germany, France, Scotland, Taiwan, China, Japan,
Singapore and Malaysia. Aviza has 500+ full-time employees and contractors
worldwide. Additional information can be found at http://www.avizatechnology.com.
NOTE: Satin and Cross-Flow are trademarks of Aviza Technology, Inc.
SOURCE Aviza Technology, Inc.
 back to top
Related links:
http://www.avizatechnology.com
CONTACT:
Sherrie Gutierrez of Aviza Technology,
+1-831-439-6382, or sherrie.gutierrez@avizatechnology.com
|
