Advanced Flow, Vacuum and Pressure Products Experiencing Wide, Industry
Acceptance and Market Share Gain
BILLERICA, Mass., July 11 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE: MYK), a leading supplier of components and subsystems to the
semiconductor industry, will showcase several of its advanced gas delivery and
chamber pressure control technologies at SEMICON West (Booth #710/South Hall)
in San Francisco, July 12-14, 2005. These digitally enabled solutions have
received strong industry acceptance worldwide from both semiconductor
equipment and chip manufacturers.
"Mykrolis's digital technologies offer superior performance and quality
combined with worldclass support -- enabling critical gas delivery and chamber
pressure control for advanced semiconductor processing," stated Charles
Adcock, senior marketing manager at Mykrolis. "The strength of these solutions
is apparent with the past year's sales growth rate outpacing industry averages
by 33% for both OEMs and End-users across the globe."
The digital gas delivery flow, vacuum and pressure products featured at
SEMICON West this year will include:
* IntelliFlow(R)3 XP -- Digital, third generation mass flow controllers
that deliver extreme performance for key attributes such as pressure
insensitivity, increased accuracy, enhanced response time, wider control
range and programmability, enabling superior capability for next
generation etch, deposition and thermal processes.
* SolidSense(R) II -- Digital based pressure transducers that utilize
leading edge, glass-fused strain gauge technology, digital temperature
compensation and unique stress isolation techniques for superior
stability and enhanced tool availability.
* XacTorr(R) CMX -- Digital high performance capacitance diaphragm gauges
(CDGs) designed for demanding thin-film applications. Superior accuracy
and stability is enabled through a combination of Mykrolis's patented
shielded sensor technology, active temperature control and digital
electronic architecture.
* Intellisys(TM) Smart Butterfly Valve -- Digital, integrated throttle
valves and controllers incorporate true adaptive control algorithms, a
direct drive micro-stepper motor and closed loop motor feedback for
superior valve response time and control resolution that enables
enhanced process yields and tool throughput.
About Mykrolis
Mykrolis is a worldwide developer, manufacturer and supplier of liquid and
gas delivery systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and chemicals, as well
as the deionized water, photoresists and vacuum systems utilized in the
semiconductor manufacturing process. In addition, the Company's products are
used to manufacture a range of other products, such as flat panel displays,
high purity chemicals, photoresists, solar cells, gas lasers, optical disks
and fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is
formerly Millipore Microelectronics, Inc. For more information, visit
http://www.mykrolis.com.
IntelliFlow, XacTorr, SolidSense are registered trademarks of Mykrolis
Corporation. Intellisys is a trademark of Nor-Cal used under license by
Mykrolis.
PRESS CONTACT:
Craig Lazinsky
Mykrolis Corporation
Tel. 978-436-6743
Craig_Lazinsky@mykrolis.com
SOURCE Mykrolis Corporation
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Related links:
http://www.mykrolis.com
CONTACT:
Craig Lazinsky of Mykrolis Corporation,
+1-978-436-6743, Craig_Lazinsky@mykrolis.com
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