Manifold Specifically Designed for Optimum Gel Removal and Media-Specific
Particle and Agglomerate Retention for Low-Flow Point-of-Use CMP Applications
BILLERICA, Mass., July 11 /PRNewswire-FirstCall/ -- Mykrolis Corporation
(NYSE: MYK), a leading supplier of components and subsystems to the
semiconductor industry, today introduced the Solaris(R) DVP Dual Transducer
Manifold, the latest addition to the Solaris product line. Solaris DVP offers
rapid, clean and safe filter changeout in seconds without the use of tools,
limiting the handling of hazardous chemicals during installation and disposal
processes. The system's advanced filtration technology provides integrated
upstream and downstream pressure transducers for online monitoring of system
and filter pressure drop to protect CMP slurries, thus allowing precise
monitoring to prevent early or late filter changeouts. Its small footprint is
designed to easily retrofit into existing tools and CMP delivery systems to
lower the total cost of ownership by minimizing customization and maximizing
process uptime.
"The Solaris DVP uses Mykrolis's advanced filtration technology that
delivers long lasting, easy to use, disposable methods of reducing defect-
causing particles, gels, and agglomerates while simultaneously allowing
critical working particles to pass through and reach the wafer," said
Christopher Wargo, director of the CMP business at Mykrolis.
The Solaris DVP Dual Transducer Manifold will on display at SEMICON West
(Booth# 710/South Hall) in San Francisco from July 12-14, 2005.
About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide
developer, manufacturer and supplier of liquid and gas delivery systems,
components and consumables used to precisely measure, deliver, control and
purify the process liquids, gases and chemicals, as well as the deionized
water, photoresists and vacuum systems utilized in the semiconductor
manufacturing process. In addition, the Company's products are used to
manufacture a range of other products, such as flat panel displays, high
purity chemicals, photoresists, solar cells, gas lasers, optical disks and
fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc.
For more information, visit http://www.mykrolis.com.
Mykrolis and Solaris are registered trademarks of Mykrolis. The Mykrolis
logo is a trademark of Mykrolis Corporation.
CONTACT:
Craig Lazinsky
Mykrolis Corporation
Tel. 978-436-6500
Craig_Lazinsky@mykrolis.com
SOURCE Mykrolis Corporation
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Related links:
http://www.mykrolis.com
CONTACT:
Craig Lazinsky of Mykrolis Corporation,
+1-978-436-6500, Craig_Lazinsky@mykrolis.com
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