Broad portfolio of industry-leading products, services and new offerings to
be displayed from July 11 to 13, 2006
CHELMSFORD, Mass., July 11 /PRNewswire-FirstCall/ -- Brooks Automation,
Inc. (Nasdaq: BRKS), which develops and produces hardware, software and
systems for the semiconductor and other complex manufacturing industries,
today announced that several new products in addition to its
industry-leading solutions are featured at the Brooks booth (#716) at
SEMICON West, in San Francisco from July 11-13, 2006.
Brooks will also be participating in several technical sessions during
the show, such as discussions on the new 300mm Prime initiative.
"This year at SEMICON West we are excited to display one of the
strongest product and services offerings in the history of the company,"
said Edward C. Grady, president and CEO of Brooks Automation. "We are
introducing many new products, including a whole new generation of
atmospheric tool automation modules and systems. In addition to the
traditionally strong Brooks offerings, we have added market leading
products from our merger with Helix Technology, ranging from high
performance cryopumps to highly-regarded global customer support offerings.
In addition, this venue is the first public opportunity for Brooks to
introduce Synetics Solutions, the customer designed automation business
that we acquired as part of the joint venture agreement with Yaskawa
Electric in Japan."
Some key products being featured at the show are:
Jet(TM) Atmospheric Transport System Jet is an all new, highly
configurable equipment front end module (EFEM) designed for advanced
semiconductor processing. Jet utilizes new, modular building blocks to
optimize all phases of an OEM tool lifecycle. Building blocks such as the
Jet Engine(R) atmospheric transfer system enable the industry's best Crate
to Operate(TM) in less than one hour. Safest, fastest, & most reliable
wafer transfer is achieved with direct drive and absolute encoders found in
the Razor(TM) atmospheric transfer robotics family. Vision(TM) load port
modules deliver the high FOUP interoperability coupled with the shortest
operational cycle times. All of this is possible because of the powerful,
easy to use Fusion(TM) control system. Come see the industry's most
complete atmospheric wafer handling solution.
Marathon(TM) 2T Vacuum System New Marathon 2 Tandem vacuum system
configuration is optimized for PVD and other high-vacuum applications. The
modular design of the Marathon 2T system allows for field expandability to
meet changing production requirements. The featured Marathon 2T system with
staged-vacuum, tandem configuration can accommodate up to 5 process
modules. Integrating proven MagnaTran(TM) Vacuum Robots, the Marathon 2T
system sets the industry benchmark for productivity and reliability.
On-Board(R) IS Vacuum Solutions
The On-Board(R) IS 320FE Cryopump is the industry standard for
semiconductor implant applications. The On-Board(R) IS 320FE has been
optimized to handle the vacuum demands and improve throughput for single
wafer high current and high energy implants, as well as the uniformity
requirements for medium current implants.
The On-Board(R) IS 8F Cryopump is the industry standard for
semiconductor PVD applications. The On-Board(R) IS 8F delivers consistent
vacuum performance throughout the life of PVD tools, across all aluminum
and copper processes. The On-Board(R) IS platform utilizes system level
feedback to compensate for high heat load processes, providing consistent
vacuum performance.
The On-Board(R) IS Single Stage Cryopump provides increased tool
availability and cleaner vacuum performance for process applications that
currently use turbo pumps. The high speed water and hydrocarbon pumping
capability within the On-Board(R) IS platform is proven to significantly
improve pump down time and improve process consistency.
Micro-Ion(R) Plus Vacuum Measurement Solution
Micro-Ion(R) Plus delivers a simplified system design across a broad
vacuum range by combining multiple vacuum gauges into one device.
Micro-Ion(R) Plus has been optimized for increased performance and lower
cost of ownership for PVD and Implant applications. All Micro-Ion(R) Plus
solutions utilize proprietary dual gauge capability to increase tool
availability while delivering consistent accuracy and repeatability.
Convectron(R) ATM Vacuum Measurement Solution
Convectron(R) is the industry standard for vacuum measurement up to 10
x -4 Torr. Convectron(R) ATM has been optimized to reduce system design
while maintaining accuracy for load lock applications. Convectron(R) ATM
reduces load lock cycle time while delivering accurate vacuum measurement
capability to atmosphere. The need for discrete atmospheric pressure
switches is eliminated.
Stabil-Ion(R) Vacuum Measurement
Stabil-Ion(R) is the industry leader in vacuum measurement for implant
applications that utilize pressure compensation for improved tool thru-put
and uniformity. Stabil-Ion(R) is the world's most stable ion gauge and has
been proven to deliver predictable performance across many implant
processes.
Polycold(R) PGCL Chuck Cooling Solution
Polycold(R) PGCL reduces operating costs and improves process
performance with PVD chuck cooling applications. PGCL is proven with copper
PVD processes to provide lower temperatures that are more stable, resulting
in repeatable tool performance.
Global Customer Support -- "A New Pathway to Productivity"
Brooks has improved its support capabilities and now offers a broad
range of services that customers require for around the clock global
support. Starting with GUTS(R) (Guaranteed Up-Time Support), a commitment
to have a plan to action in 59 minutes or less, Brooks now offers expanded
international repair capabilities to include a newly expanded repair center
in Chelmsford Mass, a newly opened repair center in Jena, Germany and a
newly enhanced repair facility in Korea; all including enhanced spares
capabilities to improve turnaround time.
Brooks Software
FACTORYworks(R), the core MES offering of Brooks for complex
manufacturing environments, has been enhanced significantly with new
modules and added functionality including its availability on the Microsoft
Windows platform. Brooks will also showcase new functionality in several
other products, including 300works(TM), a MES offering that meets the
unique requirements of highly-automated semiconductor manufacturing fabs.
The new enhancements improve productivity and make it easier to
interoperate with enterprise-level applications.
About Brooks Automation, Inc.
Brooks is a leading worldwide provider of automation solutions and
integrated subsystems to the global semiconductor and related industries.
The company's advanced offerings in hardware, software and services can
help customers improve manufacturing efficiencies, accelerate
time-to-market and reduce cost of ownership. Brooks products and global
services are used in virtually every semiconductor fab in the world as well
as in a number of diverse industries outside of semiconductor
manufacturing. For more information, visit http://www.brooks.com.
Safe Harbor Statement under Section 21E of the Securities Exchange Act
of 1934. Some statements in this press release are forward-looking
statements made under Section 21E of the Securities Exchange Act of 1934.
They include statements concerning the capabilities of certain Brooks'
products and their suitability for particular types of applications. These
statements are neither promises nor guarantees but involve risks and
uncertainties, both known and unknown, that could cause Brooks to
experience results that differ materially from our expectations. These
statements are based on current management expectations and analysis. As a
result we can provide no assurance that our future results will not be
materially different from those projected. The Company undertakes no
obligation to revise or update any forward-looking statements, or to make
any other forward-looking statements, whether as a result of new
information, future events or otherwise.
All trademarks contained herein are the property of their respective
owners.
Contact:
Mark Chung
Director of Investor Relations
Brooks Automation, Inc.
(978) 262-2459
mark.chung@brooks.com
SOURCE Brooks Automation, Inc
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Related links:
http://www.brooks.com/
CONTACT:
Mark Chung, Director of Investor Relations of
Brooks Automation, Inc., +1-978-262-2459, mark.chung@brooks.com
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