Expanding Company's Mobile Metrology Portfolio, New PlasmaVolt(TM) Solution
Offers On-the-Wafer Measurements Within Critical Plasma Processing
Environments
PLEASANTON, Calif., July 11 /PRNewswire/ -- In a move designed to
further extend its leadership in process zone control, OnWafer(R)
Technologies kicks off SEMICON West today by unveiling its ground-breaking
wireless PlasmaVolt(TM) SensorWafer(TM) product, which is designed to
monitor and control sub-100nm plasma process applications. Allowing for
direct RF field measurements on the surface of the wafer, this new product
in OnWafer's SensorWafer arsenal delivers critical spatial, as well as
time-based information. OnWafer pioneered the wireless wafer-based sensor
and has now become the mobile metrology supplier-of-choice among most of
today's leading chipmakers and original equipment manufacturers --
addressing key process control requirements in the wafer fab.
"OnWafer has again demonstrated innovative technology solutions by
offering the first-of-its-kind direct plasma measurements, collected
wirelessly on the wafer surface. Working in conjunction with our enhanced
data processing tools, spatially-resolved electrical measurements can
identify faulty reactors and improve process performance," noted OnWafer
President and CEO Rod Browning. "As customers continue to push toward 65nm
and smaller design rules, we see increased demand placed on process tools,
as well as the emergence of new requirements in mobile metrology. As such,
our customers need more than just the ability to measure temperature, but
also other critical plasma parameters. In anticipation of this need, our
PlasmaVolt solution delivers this unprecedented capability, while
leveraging our industry-proven SensorWafer platform."
OnWafer's Chief Technical Advisor, Professor Costas Spanos, noted,
"Today's announcement demonstrates the scalability of our SensorWafer
platform. Our robust intellectual property portfolio started with the
concept of wireless sensors on the surface of a wafer, mask, or other
substrate. Through continuous development of this fundamental IP, we have
extended this technology to new benchmark levels -- delivering a sensor
robust enough to deliver electrical measurements in one of the harshest
environments, plasma processing. With PlasmaVolt, we have successfully
adapted our patented measurement techniques to provide OEMs and IDMs with
the metrology technology they need, today."
PlasmaVolt data is designed to be processed within OnWafer's powerful
PlasmaSuite(TM) software package to allow complete data visualization and
analysis. A familiar look and feel of the information processing provides a
shortened time-to-results for the engineering staff. Plasma health checks,
issue resolution, and process optimization all become available at the
user's fingertips to allow increased tool uptime and yield improvement.
PlasmaVolt data can readily be utilized side-by-side with standard
PlasmaTemp chamber verification. While the PlasmaTemp provides an excellent
general chamber monitor, PlasmaVolt delivers direct spatial information
defining the RF field characteristics of the plasma and chucking system
with just the push of a button.
During SEMICON West, OnWafer will host a product launch briefing at the
Marriott Hotel, suite# 2848, on Tuesday, July 11 from 2:30 to 3:30
p.m.-media are invited to attend. The company will also be showcasing its
state-of-the- art SensorWafer products during the exhibition, which will be
held from July 11 to July 13 at the Moscone Convention Center. Editors
interested in learning more about this technology and other products within
OnWafer's process control platform are encouraged to stop by the company's
booth, # 3301, Gateway Hall.
Availability:
PlasmaVolt SensorWafers are available immediately for delivery.
About SensorWafer:
OnWafer's SensorWafers are the flagship products within the company's
breakthrough mobile metrology portfolio, which includes software tools for
both analysis and corrective methodologies needed to optimize process
performance lower maintenance costs and drive up manufacturing yields. By
extending beyond traditional wired sensor wafer temperature based process
control, this comprehensive metrology solution set enables chipmakers to
dynamically control the critical wafer process zone. Engineers are able to
look inside the process and see what is happening at the wafer surface real
time during the actual process conditions with real process gasses, not
before or after. As a result, chipmakers are able to meet their
application-specific performance requirements and extend the useable
lifetime of their process tool sets.
About OnWafer Technologies
OnWafer(R) Technologies is the pioneer and global leader of the
emerging Process Zone Control segment within the larger Process Diagnostics
Metrology market. Applications for this technology currently target
photolithography and plasma etch processes and will ultimately extend to a
broad range of mission- critical process technologies. OnWafer's "mobile
metrology" solutions feature wireless, wafer-based sensors, sophisticated
software, and optimization programs to monitor, measure and dynamically
tune process results. Founded in 2000 and headquartered in Pleasanton,
Calif., OnWafer Technologies is a privately held company. For more
information about the company and its products, visit OnWafer's website at
http://www.onwafer.com.
NOTE: PlasmaVolt, PlasmaTemp and SensorWafer are trademarks of OnWafer.
OnWafer is a registered trademark.
SOURCE OnWafer Technologies
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Related links:
http://www.onwafer.com/
CONTACT:
Paul MacDonald, Director, Plasma and Mask
Products, +1-925-416-3128, or pmacdonald@onwafer.com; or Marie
Labrie, Group Director, MCA, +1-650-968-8900, or
mlabrie@mcapr.com, for Plasma and Mask Products
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