New Substrate Handling Vacuum Transfer Robot, Magnatran Radius With
Concentrated Speed(TM), Features High Performance in a Compact Form Factor,
Extending Brooks' Industry-Leading Magnatran(TM) Product Family
CHELMSFORD, Mass., July 12 /PRNewswire-FirstCall/ -- Brooks Automation,
Inc. (Nasdaq: BRKS), which develops and produces hardware, software and
systems to enable manufacturing efficiencies for the semiconductor and other
complex manufacturing industries, today announced the release of the newest
addition to its industry-leading product line for vacuum-based applications,
the MagnaTran Radius(TM) Vacuum Transfer Robot (VTR). Featuring Brooks'
patented direct drive technology, the MagnaTran Radius VTR delivers fast swap
times within a small turning radius. The MagnaTran Radius VTR enables
critical vacuum applications such as CVD, etch, and metrology to be performed
within a smaller footprint. The MagnaTran Radius VTR supports a variety of
end effecter designs for holding substrates, including those for supporting
heavier payloads and the passive edge contact configuration that is ideally
suited for the advanced 45nm technology node.
Michael Pippins, senior vice-president and chief marketing officer at
Brooks, said "The introduction of the MagnaTran Radius Vacuum Transfer Robot
demonstrates Brooks' commitment as the industry leader to delivering new
products with innovative technology that meet the advanced requirements of our
customers. Over the next year, Brooks will be introducing more internally-
developed new products than at any other point in our history. Many of these
products are designed as enabling systems for the 45nm and smaller process
technology nodes."
James Jenson, vice-president of product marketing for OEM hardware at
Brooks, commented, "As the industry begins moving to the 45nm node, current
wafer handling technology such as vacuum grip and active edge grip will no
longer be viable. We are excited about the MagnaTran Radius because it
enables our OEM customers more flexibility and performance in tool design and
our vibration-free direct drive technology that is perfectly suited to deliver
the performance and reliability at the 45nm technology node and beyond. We
have already shipped pre-production versions of the MagnaTran Radius to select
customers and the initial reactions have been very favorable."
The MagnaTran Radius VTR and other products will be on display during
SEMICON West, July 12-14, 2005 in the Brooks booth (#2526, South Hall) at the
Moscone Center, in San Francisco, California.
About Brooks Automation, Inc.
Brooks Automation (Nasdaq: BRKS) delivers automation solutions to the
global semiconductor and related industries. The company provides hardware,
factory and tool management software, and professional services to help manage
every wafer, reticle and data movement in the fab, improving throughput and
yield while reducing cost and time to market. Brooks' products and
capabilities are used in virtually every semiconductor fab in the world. For
information, visit the company's web site at http://www.brooks.com.
All trademarks contained herein are the property of their respective
owners.
Contact:
Mark Chung
Director of Investor Relations
Brooks Automation, Inc.
(978) 262-2459
mark.chung@brooks.com
Gerald Kimber White
RF|Binder Partners
(781) 455-8250
gerald.kimberwhite@rfbinder.com
SOURCE Brooks Automation, Inc.
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Related links:
http://www.brooks.com
CONTACT:
Mark Chung, Director of Investor Relations of
Brooks Automation, Inc., +1-978-262-2459, mark.chung@brooks.com;
or Gerald Kimber White of RF|Binder Partners; +1-781-455-8250,
gerald.kimberwhite@rfbinder.com
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