New Vacuum Tool Platform, Marathon 2(TM) With Productivity Insight(TM),
Features a High Performance, Configurable Design With CenterSmart(TM)
Technology to Enable Process and Metrology Applications to 45nm and Beyond
CHELMSFORD, Mass., July 12 /PRNewswire-FirstCall/ -- Brooks Automation,
Inc. (Nasdaq: BRKS), which develops and produces hardware, software and
systems to enable manufacturing efficiencies for the semiconductor and other
complex manufacturing industries, today announced the release of the Marathon
2(TM) vacuum platform for process and metrology equipment. The Marathon 2
vacuum platform, available in compact and cluster configurations, provides
increased performance and shorter integration and cycle times for vacuum
applications at 90nm technology nodes to sub-45nm nodes. Incorporating
innovations in vacuum system design and leveraging the highly successful
MagnaTran(TM) vacuum robot technology, the Marathon 2 platform features high
throughput, small footprint and excellent reliability. The Marathon 2
platform employs CenterSmart(TM) technology from Brooks that enables precise,
repeatable wafer placement in vacuum with real time automatic trajectory
correction to offset process induced wafer shifts that could lead to wafer
damage during subsequent handling.
Michael Pippins, senior vice-president and chief marketing officer at
Brooks, said, "We are pleased to announce the new Marathon 2 vacuum platform
at SEMICON West this year. Brooks will be introducing a series of new
equipment automation products in 2005 and 2006, the culmination of an
aggressive R&D effort that will yield the largest introduction of internally-
developed new products in our history. These products were put through a
strenuous product life cycle process to optimize technology, performance,
reliability, and manufacturability. Many of these products are designed as
enabling systems for the 45nm and smaller process technology nodes. These
products are designed to meet the exacting requirements of customers and to
extend our market leadership position in both vacuum and atmospheric tool
automation."
James Jenson, vice-president of product marketing for OEM hardware, said,
"The Marathon 2 platform can be used for nearly all vacuum applications,
including CVD and etch, while the Marathon 2 Compact(TM) supports these as
well as metrology in the industry's smallest footprint 300mm vacuum system.
The initial feedback on the Marathon 2 platform from select customers has been
very favorable and we are excited about taking this product to market."
The Marathon 2 Compact and other products will be on display during
SEMICON West, July 12-14, 2005 in the Brooks booth (#2526, South Hall) at the
Moscone Center, in San Francisco, California.
About Brooks Automation, Inc.
Brooks Automation (Nasdaq: BRKS) delivers automation solutions to the
global semiconductor and related industries. The company provides hardware,
factory and tool management software, and professional services to help manage
every wafer, reticle and data movement in the fab, improving throughput and
yield while reducing cost and time to market. Brooks' products and
capabilities are used in virtually every semiconductor fab in the world. For
information, visit the company's web site at http://www.brooks.com.
All trademarks contained herein are the property of their respective
owners.
Contact:
Mark Chung
Director of Investor Relations
Brooks Automation, Inc.
(978) 262-2459
mark.chung@brooks.com
Gerald Kimber White
RF Binder Partners
(781) 455-8250
gerald.kimberwhite@rfbinder.com
SOURCE Brooks Automation, Inc.
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Related links:
http://www.brooks.com
CONTACT:
Mark Chung, Director of Investor Relations of
Brooks Automation, Inc., +1-978-262-2459, mark.chung@brooks.com;
or Gerald Kimber White of RF|Binder Partners, +1-781-455-8250,
gerald.kimberwhite@rfbinder.com
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