New Products to be Unveiled Include MagnaTran Radius(TM) Vacuum Transfer
Robot, Marathon 2(TM) Vacuum Platform, Fault Detection(TM) for Brooks'
Advanced Process Control(TM) (APC) Platform, and XsiteMobile(TM)
CHELMSFORD, Mass., July 12 /PRNewswire-FirstCall/ -- Brooks Automation,
Inc. (Nasdaq: BRKS), which develops and produces hardware, software and
systems to enable manufacturing efficiencies for the semiconductor and other
complex manufacturing industries, today announced that several new products
will be featured at the Brooks booth (#2526) at SEMICON West, in San Francisco
from July 12-14, 2005. The new products include Brooks' tool automation
products, the Marathon 2(TM) vacuum platform and the MagnaTran Radius(TM)
Vacuum Transfer Robot (VTR); and software products Fault Detection(TM) for
Brooks' Advanced Process Control(TM) (APC) platform and the XsiteMobile(TM)
handheld maintenance application.
Marathon 2
Marathon 2 is a vacuum platform for process and metrology equipment. It
features a high performance, configurable design with CenterSmart(TM)
technology to enable precise, repeatable wafer placement in vacuum with real
time automatic trajectory correction to offset process induced wafer shifts
that could lead to wafer damage during subsequent handling. Available in
compact and cluster configurations, Marathon 2 provides increased performance
and shorter integration and cycle times for vacuum applications at 90nm
technology nodes to sub-45nm nodes.
MagnaTran Radius Vacuum Transfer Robot (VTR)
MagnaTran Radius VTR is the newest addition to Brooks' industry-leading
product line for vacuum-based applications. Featuring Brooks' patented direct
drive technology, the MagnaTran Radius VTR delivers fast swap times within a
small turning radius. It embodies Concentrated Speed(TM) and enables critical
vacuum applications such as CVD, etch, and metrology to be performed within a
smaller footprint. The MagnaTran Radius VTR supports a variety of end effecter
designs for holding substrates, including those for supporting heavier
payloads and the passive edge contact configuration that is ideally suited for
the advanced 45nm technology node.
Advanced Process Control (APC) Fault Detection Application
The new Fault Detection application for the Brooks APC Platform gives
manufacturers the resources they need to measure and analyze the health of
their processes and production equipment in real-time. The Brooks Fault
Detection application enables manufacturers to rapidly identify process
deviations to reduce scrap or out of tolerance product. In addition,
manufacturers can reduce mean times to diagnose equipment problems, reduce
alarms, and ultimately minimize rework and improve equipment efficiency.
XsiteMobile
XsiteMobile is a software application for handheld devices that gives
technicians full access to all major equipment maintenance functions including
equipment lookup, view maintenance schedule, preventive maintenance (PM) and
repair work tracking and the ability to update the central Xsite(TM) system in
real-time from anywhere on the factory floor.
Other hardware products that will be on display at SEMICON West will
include:
* OneFab(TM) -- An advanced automated material handling system (AMHS) that
combines powerful routing and dispatching capabilities that enable
semiconductor fabs to achieve high performance, automated tool-to-tool
delivery of material, resulting in reduced cycle time and more
efficient fab layouts.
* RF technology -- Standard and customizable RFID solutions for tracking
and helping manage material movement.
Other software products that will be on display at SEMICON West will
include:
* Advanced Process Control (APC) Platform -- A next-generation, SEMI-
compliant platform that enables seamless, plug-and-play integration
with graphical modeling, data analysis, model management, and other APC
tools.
* Run-to-Run Application for APC -- A plug-in application module that
provides a process control development environment that lowers the cost
of ownership by reducing model management activities through a unified
modeling structure and advanced technology particularly suited for high
mix product environments.
* FACTORYworks3(R) -- A manufacturing execution system (MES) that helps
manufacturers "sense, decide and respond" to environment changes and
exceptions in real time. It is the first MES to provide a comprehensive
manufacturing application platform for fully-integrated equipment
maintenance management, corrective/ preventative action and tooling and
container management.
"At SEMICON West this year, we are showcasing the most innovative
technology in manufacturing automation for today's most advanced semiconductor
fabs," said Ed Grady, president and chief executive officer of Brooks
Automation. "Our latest products demonstrate Brooks' ongoing commitment to
revolutionize the semiconductor industry with leading edge technologies that
help customers' meet their goals of providing a seamless manufacturing process
from the factory floor throughout their entire supply chain -- resulting in
reduced cycle times and increased visibility in real-time, which ultimately
makes factories more efficient."
About Brooks Automation, Inc.
Brooks Automation (Nasdaq: BRKS) delivers automation solutions to the
global semiconductor and related industries. The company provides hardware,
factory and tool management software, and professional services to help manage
every wafer, reticle and data movement in the fab, improving throughput and
yield while reducing cost and time to market. Brooks' products and
capabilities are used in virtually every semiconductor fab in the world. For
information, visit the company's web site at http://www.brooks.com.
About Brooks Software
Brooks Software, a division of Brooks Automation, provides real-time
applications that support enterprise-wide initiatives for greater efficiency
and productivity in collaborative, complex manufacturing. Brooks' Sense Decide
Respond(TM) manufacturing software solutions are the foundation for enterprise
initiatives in supply chain execution, closed loop automation, lean
manufacturing and enterprise performance management. Installed in the majority
of Fortune 500 manufacturers, Brooks Software delivers competitive advantage
to aerospace & defense, automotive, high tech, life sciences and semiconductor
manufacturers worldwide. For more information, visit
http://www.brookssoftware.com.
All trademarks contained herein are the property of their respective
owners.
Contact:
Mark Chung
Director of Investor Relations
Brooks Automation, Inc.
(978) 262-2459
mark.chung@brooks.com
Gerald Kimber White
RF Binder Partners
(781) 455-8250
geraldkimberwhite@rfbinder.com
SOURCE Brooks Automation, Inc.
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Related links:
http://www.brooks.com
http://www.brookssoftware.com
CONTACT:
Mark Chung, Director of Investor Relations of
Brooks Automation, Inc., +1-978-262-2459, mark.chung@brooks.com;
or Gerald Kimber White of RF Binder Partners, +1-781-455-8250,
geraldkimberwhite@rfbinder.com
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