Advanced Technology Features Extend Gapfill to 32nm Memory and Logic
Devices
SAN JOSE, Calif., July 14 /PRNewswire-FirstCall/ -- Novellus Systems,
Inc. (Nasdaq: NVLS) today announced the introduction of SPEED(R) Max(TM),
the latest enhancement to its production-proven high-density plasma (HDP)
CVD platform. Designed to address the needs of customers manufacturing
flash, DRAM and logic integrated circuits, SPEED Max reduces total capital
expenditures due to its flexibility to process multiple layers and
applications on a single platform. The system employs innovative new
features and capabilities that provide productivity increases of up to 50
percent and process extendibility to the 32nm node. Hynix Semiconductor's
M10 fab was able to use SPEED Max to process a number of different products
without changing configuration, enabling Hynix to qualify multiple devices
and applications in a very short period of time. The platform's ease of use
helps improve cycle time and process transparency at Hynix M10.
(Photo: http://www.newscom.com/cgi-bin/prnh/20080714/AQM093)
"Novellus developed SPEED Max to meet the needs of chipmakers for a
flexible and cost-effective gapfill solution that will extend HDP
technology to future device nodes," said Kaihan Ashtiani, vice president
and general manager of Novellus' Gapfill business unit. "SPEED Max enables
a greater than 50 percent improvement in productivity, providing the lowest
cost of ownership. In addition, SPEED Max employs an innovative plasma
source technology that extends its gapfill capabilities to the 32nm node,
reducing capital cost expenditures for customers as they transition to
next-generation devices. The value demonstrated by SPEED Max has resulted
in rapid acceptance among customers. More than 50 SPEED Max modules are in
production today at fabs across the world -- a number expected to grow to
more than 100 by the end of 2008."
SPEED Max combines a number of new features to achieve superior
performance in process uniformity, gapfill and defectivity, resulting in
demonstrated improvements in product yield. The flexibility of the SPEED
Max platform also helps reduce customers' total capital costs through a 30
percent reduction in the number of tools required for a given manufacturing
output, with a commensurate reduction in fab labor and floor space.
SPEED Max will be on display during SEMICON West at the Novellus
exhibit in the Yerba Buena Center for the Arts, July 15-17.
About SPEED:
The SPEED high-density plasma (HDP) system is a production-proven
platform for the deposition of various high-quality silicon oxide films
used in the production of integrated circuits for memory and logic devices.
SPEED's unique ceramic dome, large volume chamber and high vacuum pumps
have made the system the platform of choice for HDP CVD deposition in many
IC manufacturing environments. SPEED is available in both 200mm and 300mm
configurations.
About Novellus:
Novellus Systems, Inc. (Nasdaq: NVLS) is a leading provider of advanced
process equipment for the global semiconductor industry. The company's
products deliver value to customers by providing innovative technology
backed by trusted productivity. An S&P 500 company, Novellus is
headquartered in San Jose, Calif. with subsidiary offices across the globe.
For more information, please visit http://www.novellus.com.
"Safe Harbor" Statement under the Private Securities Litigation Reform
Act of 1995
This press release contains forward-looking statements within the
meaning of Section 27A of the Securities Act of 1933, as amended, and
Section 21E of the Securities Exchange Act of 1934, as amended, including
statements regarding (i) the company's belief that SPEED Max reduces total
capital expenditures due to its flexibility to process multiple layers and
applications on a single platform, (ii) the company's belief that SPEED Max
enables a greater than 50 percent improvement in productivity, providing
the lowest cost of ownership, and (iii) the company's expectation that
while more than 50 SPEED Max modules are in production today at fabs across
the world, by the end of 2008 that number will grow to more than 100.
Forward-looking statements are subject to risks and uncertainties that may
cause actual results to differ materially from those contemplated by the
forward-looking statements. Such risks and uncertainties include, but are
not limited to, the introduction of competitive products in the market
which affect the rate in which customers adopt SPEED Max, inefficiencies in
the allocation of funds to our strategic product research and development
efforts to meet customer demands while keeping production costs low and
unforeseen disruptions in the manufacturing and production of SPEED Max
that delay the introduction of SPEED Max into the market, as well as other
risks indicated in our filings with the Securities and Exchange Commission
(SEC). For more details, please refer to our SEC filings and the amendments
thereto, including our Annual Report on Form 10-K for the year ended
December 31, 2007, our Quarterly Reports on Form 10-Q for the quarter ended
March 29, 2008 and our Current Reports on Form 8-K. Forward-looking
statements are made and based on information available to us on the date of
this press release, and we assume no obligation to update them.
SPEED is a registered symbol and SPEED Max is a registered trademark of
Novellus Systems, Inc.
Pushpita Prasad
Novellus Systems, Inc.
Phone: + 1 408/943-9700
E-mail: pushpita.prasad@novellus.com
Joseph R. Kilmer
The Hoffman Agency for Novellus Systems, Inc.
Phone: + 1 408/975-3032
E-mail: jkilmer@hoffman.com
SOURCE Novellus Systems, Inc.
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Related links: http://www.novellus.com
Photo Notes: NewsCom: http://www.newscom.com/cgi-bin/prnh/20080714/AQM093 PRN Photo Desk, photodesk@prnewswire.com
CONTACT: Pushpita Prasad of Novellus Systems, Inc., +1-408-943-9700, pushpita.prasad@novellus.com; or Joseph R. Kilmer of The Hoffman Agency, +1-408-975-3032, jkilmer@hoffman.com, for Novellus Systems, Inc.
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