CHELMSFORD, Mass., July 16 /PRNewswire-FirstCall/ -- Brooks Automation,
Inc. (Nasdaq: BRKS), which helps create manufacturing efficiency for the
semiconductor and other complex manufacturing industries, today announced
that its industry-leading products and solutions are featured at SEMICON
West at the Brooks booth (#720 South Hall, Moscone Center) in San Francisco
from July 16-18, 2007.
Brooks will also be participating in several technical sessions during
the show, including the featured program, "Next Generation Fab: Defining
300mm Prime", on Thursday, July 19, 8:30am-10:00am Pacific. Chris
Hofmeister, Chief Technology Officer of Brooks Automation, will be featured
along with other speakers from the industry.
Some key products being featured at the show are:
Jet(TM) Atmospheric Transport Platform
The Jet Atmospheric Transport Platform is an all new, highly
configurable, equipment front end module (EFEM) designed for advanced
semiconductor processing. Jet utilizes new, modular building blocks to
optimize all phases of an OEM tool lifecycle. Building blocks such as the
Jet Engine(R) atmospheric transfer system enable the industry's best
Crate-to-Operate(TM) in less than one hour. The Razor(TM) atmospheric
transfer robot family, with its patented motion control algorithms, direct
drive technology and proprietary passive contact end effector technology
enable the safest, fastest, and most reliable wafer transfer in the
industry. Vision(TM) load port modules deliver high FOUP interoperability
coupled with the shortest operational cycle times. All of this is possible
because of the powerful, easy to use Fusion(TM) control system.
Marathon(TM) 2Q Vacuum Transfer Platform
New Marathon 2Q vacuum transfer platform is optimized for short process
time, single step semiconductor manufacturing applications. With the
innovative MagnaTran Quadrafly(TM) vacuum robot and SpeedLock(TM) load
locks the Marathon 2Q platform sets a new benchmark for high throughput
semiconductor automation equipment. The modular platform design
accommodates four or six process modules while significantly reducing fab
footprint requirements.
MagnaTran(R) 8 Radius
The MagnaTran(R) 8 Radius robot extends the benefits of MagnaTran 7(R)
field-proven, direct drive technology to a tri-axial drive. In addition,
the MagnaTran 8 Family leverages proven SCARA arm technology to provide 4
second fast swaps within a small containment diameter. Both the tri-axial
drive and the dual SCARA arm have been designed to accommodate heavier
payloads up to 3 Kg.
Brooks Automation CTI-Cryogenics(R) Re-Defines the Standard for PVD
High Vacuum Pumping with the Release of the On-Board(R) IS XP System
Brooks' CTI-Cryogenics(R) On-Board IS(R) 8F XP cryopump has been
optimized for next generation PVD processes and offers over 40% improvement
of mixed gas capacity. By providing such a large improvement in capacity,
PVD processes may be optimized for new technology nodes without impacting
tool availability due to increased regeneration cycles. On-Board IS XP has
been tested to be process transparent and is 100% compatible with the
existing industry standard On-Board IS 8F PVD solution. On-Board IS 8F XP
is available for new equipment immediately and is field up-gradable for the
existing installed base of over 3000 On-Board IS 8F PVD pumps.
On-Board IS(R) 8F XP includes all the proven benefits of the
On-Board(R) IS platform. On-Board(R) IS high pressure operation and
innovative compressor design delivers 20% less run time power consumption
than other systems. On- Board IS intelligent helium management distributes
cooling power to each pump when needed, enabling stable vacuum performance
over several years of running high heat load processes. On-Board IS
intelligent helium management has enabled customers to run six (6)
cryopumps on one compressor for several years in a high volume production
environment without sacrificing vacuum performance.
Brooks Automation Granville-Phillips(R) Releases Optimized Micro-Ionā
Vacuum Measurement Solution for Implant Applications
Granville-Phillips(R) announced today the release of a Micro-Ion
Implant Gauge that is optimized for Implant source and beam-line
applications, and offers a 300% or more increase in gauge lifetime.
Granville-Phillips worked closely with a major Implant equipment supplier
to increase source-region gauge life, beamline response time and
cleanliness, and address other Implant equipment process challenges to
improve system performance and gauge cost-of- ownership. The Micro-Ion
Implant Gauge includes Implant specific gauge baffling solutions, optimized
gauge control electronics and improved thermal management that dramatically
improves gauge-life performance and measurement accuracy. Major End-Users
are currently evaluating the Micro-Ion Implant Gauge performance in a
retrofit application and realizing greater than 300% improvement in gauge
lifetime.
Brooks Automation Polycold(R) Systems Announces the Availability of the
Polycold(R) PGCL for Wafer and Chamber Cooling
Brooks' Polycold(R) PGCL has been tested and qualified on a PVD process
for Copper/Tantalum barrier-seed deposition. By providing a lower chuck
temperature (as low as -70 deg.C), higher process thermal loads can be
managed while maintaining the wafer at the required temperature. This
enables better film uniformity, higher process yields and wafer throughput.
The closed loop gas chiller provides cooling of wafers and chucks using
an inert gas coolant. It also eliminates problems associated with liquid
chillers such as leaks into the chamber that lead to significant system
down time, cost of replacement fluid, safety concerns, and process
contamination. By recycling the chilled inert gas coolant, PGCL also
reduces the system's Total Cost Of Ownership when compared to the operating
cost of an open loop gas chiller by eliminating the cost of continuous
high-purity gas supply.
Global Customer Support - "Committed to Our Customer's Success"
Brooks has continued to improve its customer support capabilities. From
GUTS(R) (Guaranteed Up-Time Support) -- our around the clock, around the
globe support commitment -- to the continued improvement of international
repair capabilities, Brooks Global Customer Support (GCS) is working hard
to show commitment to our customer's success. Brooks' Fixed Price Repair
program has helped customers save up to eight weeks in cycle time for robot
repair. TrueBlue(R) Service Agreements give customers leverage to Brooks'
global infrastructure and systems knowledge which provide more options to
reducing unscheduled downtime.
This year GCS is featuring an interactive upgrades station focused on a
variety of upgrades designed to improve overall system performance. Each
process in wafer fabrication has unique operational challenges, and GCS's
portfolio of process specific upgrades can help optimize productivity and
lower Cost of Ownership. GCS is also featuring a new GOLDLink(R) station
with a demonstration of the GOLDLink customer website. GOLDLink is a
predictive e- diagnostics tool; a virtual presence in the fab monitoring
the health of the cryo pump systems 24 hours a day to ensure unscheduled
downtime is minimized. Finally, GCS is hosting a puzzle contest, designed
to demonstrate the time that customers can save when they utilize Brooks'
support team to service Brooks' equipment. GCS is committed to expanding
its broad service portfolio and continuing to help customers solve their
productivity needs.
About Brooks Automation, Inc.
Brooks is a leading worldwide provider of automation solutions and
integrated subsystems to the global semiconductor and related industries.
The company's advanced offerings can help customers improve manufacturing
efficiencies, accelerate time-to-market and reduce cost of ownership.
Brooks products and global services are used in virtually every
semiconductor fab in the world. For more information, visit
http://www.brooks.com .
Safe Harbor Statement under Section 21E of the Securities Exchange Act
of 1934. Some statements in this press release are forward-looking
statements made under Section 21E of the Securities Exchange Act of 1934.
They include statements concerning the capabilities of certain Brooks'
products and their suitability for particular types of applications. These
statements are neither promises nor guarantees but involve risks and
uncertainties, both known and unknown, that could cause Brooks to
experience results that differ materially from our expectations. These
statements are based on current management expectations and analysis. As a
result we can provide no assurance that our future results will not be
materially different from those projected. The Company undertakes no
obligation to revise or update any forward-looking statements, or to make
any other forward-looking statements, whether as a result of new
information, future events or otherwise.
All trademarks contained herein are the property of their respective
owners.
SOURCE Brooks Automation, Inc.
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Related links:
http://www.brooks.com/
CONTACT:
Mark Chung, Director of Investor Relations of
Brooks Automation, Inc., +1-978-262-2459, mark.chung@brooks.com
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